| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wave front aberration correction mirror which carries out aberration correction with higher precision and a simpler structure. <P>SOLUTION: When flatness of a mirror substrate (6) is poor, a signal is received from sensor electrodes (23, 24) and a displacement driving voltage corresponding to the poor flatness is applied to driving electrodes (21, 22) as offset voltages. Thereby the flatness of the mirror substrate (6) is improved, and additionally a voltage for aberration correction is applied to the driving electrodes (21, 22). In this case, a mirror displacement signal is always outputted from the sensor electrodes (23, 24) and feedback is applied if necessary. Because the detection sensor is made of the same material (the same piezoelectric material) as that for a driving piezoelectric element, deformation of the mirror substrate is directly transmitted to the detection sensor and an accurate feedback is applied so as to make the flatness and an aberration correction shape are accurately controlled. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
