发明名称 |
Optical proximity correction in raster scan printing based on grayscale manipulation of the bitmap |
摘要 |
Methods and apparatus for correcting defects, such as rounded corners and line end shortening, in patterns formed via photolithography are provided. Such defects are compensated for "post-rasterization" by manipulating the grayscale values of pixel maps. |
申请公布号 |
US2005036175(A1) |
申请公布日期 |
2005.02.17 |
申请号 |
US20040870597 |
申请日期 |
2004.06.16 |
申请人 |
KLATCHKO ASHER;PIROGOVSKY PETER Y. |
发明人 |
KLATCHKO ASHER;PIROGOVSKY PETER Y. |
分类号 |
G06T5/00;H04N1/409;(IPC1-7):G06K15/00;G06K9/46;H04N1/407 |
主分类号 |
G06T5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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