| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for accurately evaluating polarization characteristics inherent to a ferroelectric capacitor without being affected by the variation of processing dimensions of electrodes constituting the ferroelectric capacitor. <P>SOLUTION: The method for evaluating the ferroelectric capacitor having a capacitance insulating film consisting of a ferroelectric material comprises steps of measuring a remnant polarization value (2Pr) of the ferroelectric capacitor, and a nonvolatile polarization value (Pnv) obtained by deducting attenuation components ascribed to short-time polarization mitigation from the remnant polarization value; calculating a polarization mitigation rate expressed by a formula (2Pr-Pnv)/2Pr or a nonvolatile polarization rate expressed by a formula Pnv/2Pr from the remnant polarization value and the nonvolatile polarization value; and evaluating the characteristics of the ferroelectric capacitor, based on the polarization mitigation rate or the nonvolatile polarization rate. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
