| 发明名称 |
Substrate retainer wear detection method and apparatus |
| 摘要 |
An apparatus and method are provided for detecting wear in substrate retainers used for chemical mechanical planarization processes. A substrate retainer is provided that is adapted to enable a sensor to detect when the wear edge of the retainer has worn to a critical wear threshold so that the retainer may be replaced prior to failure.
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| 申请公布号 |
US2005037690(A1) |
申请公布日期 |
2005.02.17 |
| 申请号 |
US20030640735 |
申请日期 |
2003.08.13 |
| 申请人 |
HEIDRICH KEVIN E.;ROBERTS LIAM S. |
发明人 |
HEIDRICH KEVIN E.;ROBERTS LIAM S. |
| 分类号 |
B24B1/00;B24B7/30;B24B37/04;B24B41/06;B24B49/00;B24B49/12;(IPC1-7):B24B49/00 |
主分类号 |
B24B1/00 |
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