发明名称 |
Radio frequency langmuir probe |
摘要 |
A Langmuir probe for measuring characteristics of a plasma driven by radio frequency (RF) power comprises an elongated conductor 10 having an exposed tip 1 for insertion into an RF plasma and an outer end 3 for connection to external measuring circuitry. In order to reduce distortion over a range of RF frequencies, the probe includes an RF voltage divider 11, 12, 13, 14 in series between the tip and outer end of the conductor.
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申请公布号 |
US2005035770(A1) |
申请公布日期 |
2005.02.17 |
申请号 |
US20040837396 |
申请日期 |
2004.04.30 |
申请人 |
HOPKINS MICHAEL;HEYNEN PAUL |
发明人 |
HOPKINS MICHAEL;HEYNEN PAUL |
分类号 |
G01R19/00;(IPC1-7):G01R27/28 |
主分类号 |
G01R19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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