PLASMA CORROSION RESISTANT THERMAL SPRAYING MEMBER, AND ITS PRODUCTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a plasma corrosion resistant thermal spraying member reduced in the total gas discharge amount in a working temperature region, attaining a prescribed vacuum in a short time, exerting little influence on etching and a film deposition process, and capable of improving the yield of a device.

SOLUTION: The plasma corrosion resistant thermal spraying member is obtained by depositing a yttria sprayed coating on a base material by a plasma spraying method. The total gas discharge amount in the temperature region from 50 to 240°C is ≤120 μl/cm2.

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