| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a treating agent and a treating method of waste gas containing acid gas and/or hydrocarbon which is capable of efficiently detoxifying waste gas containing the acid gas and/or hydrocarbon produced from a manufacture process under vacuum, does not allow the degree of vacuum to fall, does not permit a vacuum pump to corrode and, moreover, has a long life and excellent operability. <P>SOLUTION: The treating agent of waste gas containing acid gas and/or hydrocarbon comprises an inorganic acid salt of amine and an activated carbon. The waste gas containing the acid gas and/or hydrocarbon is treated by being allowed into contact with the treating agent under vacuum. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
