| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam irradiation device capable of easily realizing the material modification, the material inspection, measurement or the maintenance work in a short time even when the material is located in a narrow space, or a space which cannot be reached unless reaching via a narrow passage. <P>SOLUTION: First laser beams L1 which are oscillated from a first laser beam source 1 and irradiated on a material M to modify the material M, and second laser beams L2 which are oscillated from a second laser beam source 6, irradiated on the material M to detect the reflected component and inspect or measure cracks of a cracked portion are irradiated on the material M via an integrated optical system 14. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
