| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical encoder capable of stabilizing the intensity of a light beam and achieving sensor compactness. <P>SOLUTION: The optical encoder comprises a light source 1, a scale 2 having a periodic optical pattern which relatively moves with respect to the light source 1, and a photodetector 3 capable of detecting changes in the intensity pattern of the light beam emitted from the light source 1 and reflected and modulated by the scale 2. In the optical encoder, the photodetector 3 and a recession part 110 are formed on a semiconductor substrate 5, the light source 1 is arranged at the recession part 110 on the semiconductor substrate 5, and a slit 100 is arranged on the recession part 110 in such a way that the light beam emitted from the light source 1 may irradiated the scale 2 after passing through the slit 100. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
