| 发明名称 |
Heating/cooling method, manufacturing method of image displaying apparatus, heating/cooling apparatus, and heating/cooling processing apparatus |
| 摘要 |
A heating/cooling method, a manufacturing method of an image displaying apparatus, a heating/cooling apparatus, and a heating/cooling processing apparatus, in which the heating and cooling of a substrate can be executed at a high speed are provided.
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| 申请公布号 |
US2005034850(A1) |
申请公布日期 |
2005.02.17 |
| 申请号 |
US20040885683 |
申请日期 |
2004.07.08 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
YOSHIMURA MASANAO;YAKOU TAKESHI;KOMURA AKIHIKO;KIMURA AKIHIRO;KAMATA SHIGETO |
| 分类号 |
C03B29/02;C03B32/00;C03C23/00;F27B17/00;F27D19/00;F27D99/00;H01J9/24;(IPC1-7):F01P7/10;F28F27/00 |
主分类号 |
C03B29/02 |
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