| 摘要 |
PROBLEM TO BE SOLVED: To provide a raster (scan) microscope the detection efficiency of which hardly depends on the scan speed. SOLUTION: This is a confocal raster (scan) microscope which scans objects being detected having an illumination beam path including at least one point light source and a beam deflection device, and a detection beam path including at least one detection (pin) hole diaphram and the beam deflection device. The path of the illumination beam path and/or the detection beam path is constituted applicable to the scanning speed. COPYRIGHT: (C)2005,JPO&NCIPI
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