COMPOSITION FOR FORMING SILICA-BASED COATING FILM, MANUFACTURING METHOD FOR SILICA-BASED COATING FILM, AND ELECTRONIC PART

摘要

PROBLEM TO BE SOLVED: To provide such a composition for forming a silica-based coating film as capable of forming a silica-based coating film which is excellent in the mechanical strength such as sufficient resistance to CMP, low dielectric properties and also adhesive properties. SOLUTION: The composition for forming the silica-based coating film comprises (a) component: a siloxane resin such as an alkoxy silane, (b) component: a solvent such as alcohols having capability of dissolving said siloxane resin, and (c) component: an onium salt such as an ammonium salt. COPYRIGHT: (C)2005,JPO&NCIPI