MULTIPLICATIVE MICROELECTRONIC PRESSURE GAUGE

摘要

The invention relates to measuring engineering, in particular to measuring nonelectrical quantities, namely to semiconductor pressure gauges. The technical aim of said invention is to increase the accuracy of measurement of constant pressures. In the first variant, the aim is achieved by that the inventive multiplicative microelectronic pressure gauge, like a prototype, comprises a semiconductor crystal provided with an elastic element in the form of a projection on the surface thereof, at least one sensing element formed in said projection, a concentrator whose surface area is larger than the projection surface area and which is connected thereto and used for converting the measured pressure into a force applied to the elastic element. Contrary to the prototype, said projection is embodied in the form of a closed frame, the rigid concentrator is embodied in the form of a solid-state plate, the connection between the projection surface and the concentrator is embodies in such a way that it is rigid and vacuum tight. In the second variant, the aim is achieved in that the crystal comprises two projections which are arranged on the surface thereof and embodied in the form of two similar frames. One frame is closed and the second frame comprises at least one break, the sensing element is embodied in the form of four tenzoresistors formed by pairs in each projection. The concentrator is embodied in the form of a solid-state plate which is rigidly and vacuum-tightly connected to the surface of the projection embodied in the form of a closed frame. In addition, said pressure gauge is provided with a second solid-state plate which is identical to the embodiment of said concentrator and rigidly connected to the surface of the projection having at least one break.