发明名称 METHOD AND APPARATUS FOR FORMING PATTERN
摘要 PROBLEM TO BE SOLVED: To provide a method for forming a pattern which does not need a mask, can correspond flexibly to the change of the shape of a wiring pattern, needs only a short pattern forming time, can keep costs low, is hardly affected by dust and the surface state of an insulating substrate, saves a solution in an application process, and can form a three-dimensional pattern layer and an apparatus for the method. SOLUTION: A three-dimensional partition wall 12 surrounding a prescribed area is formed by discharging the droplets of the insulator forming solution on the insulating substrate 10. A pattern layer precursor 13 is formed by discharging the droplets of a conductor forming liquid containing conductive particles in a recessed pattern layer forming area 14 formed by being surrounded with the partition wall 12. Conductivity development treatment is applied to the precursor 13 to form a pattern layer 16 which is a conductor layer. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005040665(A) 申请公布日期 2005.02.17
申请号 JP20030200621 申请日期 2003.07.23
申请人 FUJI PHOTO FILM CO LTD 发明人 FUKUNAGA TOSHIAKI;SAWANO MITSURU
分类号 B05D5/12;B05C5/00;B05C11/10;B05D3/06;B05D7/00;H01L21/027;(IPC1-7):B05D5/12 主分类号 B05D5/12
代理机构 代理人
主权项
地址