| 摘要 |
PROBLEM TO BE SOLVED: To provide a copying probe capable of securing followability, realizing high response, and improving sufficiently the measurement accuracy. SOLUTION: This probe has a constitution equipped with a gage head 6 supported movably by a probe body part 4 through elastic members 5D, 5E, 5F, micro-motion means 3, 7 for moving the probe body part 4 and the gage head 6 relative to a measuring object in a micro-range, a contact force detection means 5G for detecting a contact force between the gage head 6 and the measuring object surface, and a contact force correction means 8 for correcting the contact force by excluding an inertia force acting on the gage head 6 by an acceleration from the contact force. Hereby, since a measuring force can be adjusted by performing feedback control of the micro-motion means 3, 7, the followability can be secured, and the high response and high accuracy of the measurement can be realized. In addition, a measurement error can be corrected and the true measuring force can be acquired by excluding the inertia force of the gage head 6, to thereby perform highly accurate measurement. COPYRIGHT: (C)2005,JPO&NCIPI
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