发明名称 |
PERIMETER PARTITION-VALVE WITH PROTECTED SEALS AND ASSOCIATED SMALL SIZE PROCESS CHAMBERS AND MULTIPLE CHAMBER SYSTEMS |
摘要 |
A seal-protected perimeter partition valve apparatus (450) defines a vacuum and pressure sealed space (401) within a larger space (540) confining a substrate processing chamber with optimized geometry, minimized footprint and 360° substrate accessibility. A compact perimeter partitioned assembly (520) with seal protected perimeter partition valve (450) and internally contained substrate placement member (480) further provides processing system modularity and substantially minimized system footprint. |
申请公布号 |
WO2005015613(A2) |
申请公布日期 |
2005.02.17 |
申请号 |
WO2004US25612 |
申请日期 |
2004.08.09 |
申请人 |
SUNDEW TECHNOLOGIES, LLC;SNEH, OFER |
发明人 |
SNEH, OFER |
分类号 |
C23C16/44;C23C16/455;C23C16/54;H01L21/00;H01L21/677 |
主分类号 |
C23C16/44 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|