| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator wherein a via electrode filling rate is high. <P>SOLUTION: In a piezoelectric actuator wherein piezoelectric layers and internal electrodes are alternately laminated and terminal electrodes are formed on top of the laminate, via electrodes are formed to electrically connect the internal electrodes and the terminal electrodes. A cross-sectional area of each via electrode in a surface end is larger than that in a connection end with the internal electrode. Meanwhile, in a piezoelectric actuator wherein piezoelectric layers and internal electrodes are alternately laminated and terminal electrodes are formed on top of the laminate, via electrodes are formed to electrically connect the internal electrodes and the terminal electrodes. A wall face of each via electrode in a surface end is partially removed, and the diameter of the via electrode in the wall face-removed part is continuously increased from inside toward the surface. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
