A birefringence correction is incorporated into an optical imaging system for imaging with deep ultraviolet light. Optical elements which exhibit an intrinsic birefringence with deep ultraviolet light are arranged in a fashion that renders accumulated birefringence less sensitive to the angular orientation of the beam's rays around the optical axis. A compensating optic corrects a residual radially symmetric component of the birefringence.
申请公布号
WO03076978(A3)
申请公布日期
2005.02.17
申请号
WO2003US06652
申请日期
2003.03.05
申请人
CORNING TROPEL CORPORATION;WEBB, JAMES, E.;BRUNING, JOHN, H.