发明名称 |
Dual beam system |
摘要 |
A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.
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申请公布号 |
US2005035291(A1) |
申请公布日期 |
2005.02.17 |
申请号 |
US20040889967 |
申请日期 |
2004.07.13 |
申请人 |
HILL RAYMOND;SANFORD COLIN AUGUST;SCIPIONI LAWRENCE;DIMANNA MARK;TANGUAY MICHAEL |
发明人 |
HILL RAYMOND;SANFORD COLIN AUGUST;SCIPIONI LAWRENCE;DIMANNA MARK;TANGUAY MICHAEL |
分类号 |
H01J37/141;H01J37/02;H01J37/08;H01J37/26;H01J37/28;H01J37/30;(IPC1-7):H01J37/28 |
主分类号 |
H01J37/141 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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