| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and a device for manufacturing compact electron sources of a simple structure, of low device cost and suited for mass production. <P>SOLUTION: Marks put on a base plate are read out, a volume of displacement between a probe conducted to an electrode wiring on the base plate and the electrode wiring is detected, and positioning of the probe and the electrode wiring is made by relative movement of a probe base holding the probe and a support pedestal toward a face of the base plate according to the displacement volume. Next, the electrode wiring and the probe are made in contact with each other by relative up-and-down movement of the probe base and the support pedestal, and then, electricity is passed on the electrode wiring on the base plate through the probe to carry out a given treatment. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
