MICROMECHANICAL RESONATOR DEVICE AND METHOD OF MAKING A MICROMECHANICAL DEVICE
摘要
A micromechanical resonator device and a method of making the micromechanical resonator device, as well as other extensional mode devices are provided wherein anchor losses are minimized by anchoring at one or more side nodal points of the resonator device. Lower damping forces are experienced by the resonator device when operated in air.
申请公布号
WO2005015735(A2)
申请公布日期
2005.02.17
申请号
WO2003US40334
申请日期
2003.12.17
申请人
THE REGENTS OF THE UNIVERSITY OF MICHIGAN;NGUYEN, CLARK, T., C.;ABDELMONEUM, MOHAMED, A.