| 摘要 |
Compensating for semiconductor wafer tilt by rotating the semiconductor wafer and averaging the resulting semiconductor wafer tilts detected is disclosed. The semiconductor wafer has an asymmetrical topography. A first leveling tilt of the semiconductor wafer is detected using a leveling sensor of a stepper. The semiconductor wafer is then effectively or actually rotated, such as by forty-five degrees, ninety-degrees, or one-hundred-eighty degrees. A second leveling tilt of the semiconductor wafer is then detected, again using the leveling sensor of the stepper. The first and the second leveling tilts are averaged to yield an average leveling tilt. The average leveling tilt is then compensated for, by, for instance, oppositely tilting the semiconductor wafer in an effective or actual manner.
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