Multiple adaptable 3-dimensional ultra-high speed scanning system for organic and inorganic surface topography and spectrometry

摘要

A 3-dimensional ultra-high speed scanning system for organic and inorganic surface topography and spectrometry has a 3-dimensional head to scan an object to be analyzed. The scanning head is operatively associated with a path length variator which in turn is operatively connected to a single mode wavelength coupler. A light source and a photo detector are operatively connected to the wavelength coupler. A computer with software for data reduction and 3-dimensional representation are connected to both the light source and the photo detector to reveal scanning data of an object scanned by the scanning head. A spectrometer is alternately coupled to the photo detector.