| 摘要 |
PROBLEM TO BE SOLVED: To provide a device capable of detecting defects of a transparent plate in dark field, by using the light introduced inside of a sample. SOLUTION: The device (1) for inspecting defects of the transparent plate is provided with a sidelight introducing means (4, 5) for introducing a light from the side surface of a transparent plate sample (2) so that total reflection occurs on the surface of the transparent plate sample (2), and means (6-8) for detecting the scattered light in the dark field, which is emitted when the introduced light is scattered by the defects or foreign substances inside the transparent plate sample (2) or on its surface. Furthermore, line-like light which is formed by triply overlapping fiber grating elements used as the sidelight introducing means (4, 5) is introduced from the side surface of the transparent plate sample (2). COPYRIGHT: (C)2005,JPO&NCIPI
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