| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating apparatus capable of uniformly discharging a solution from a plurality of nozzles, and a coating method using it. SOLUTION: The coating apparatus for ejecting a solution to coat the surface of a substrate W is equipped with a transport table for transporting the substrate W, a head 9 provided above the transport table and equipped with the nozzles, a piezoelectric vibrator provided in the head 9 to discharge the solution from the nozzles in a liquid droplet state by the application of a drive signal, a high speed camera 61 for detecting the volume of each of the liquid droplets L discharged from the nozzle, an image processor 66 and a drive control device 67 for controlling the drive signal on the basis of the volume of each of the liquid droplets L obtained by the high speed camera 61 and the image processor 66 to adjust the amount of the solution discharged from the nozzles. COPYRIGHT: (C)2005,JPO&NCIPI
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