| 摘要 |
PROBLEM TO BE SOLVED: To provide a new monomer compound having a lactone structure and capable of providing a polymer having excellent characteristics as a resist material or the like. SOLUTION: The compound is represented by general formula [1] (wherein R<SP>1</SP>and R<SP>2</SP>are each independently an alkyl group; R<SP>3</SP>and R<SP>4</SP>are each independently a hydrogen atom or an alkyl group; R<SP>5</SP>is a hydrogen atom, an acryloyl group or a methacryloyl group; X is a methylene group which may be substituted with an alkyl group or an ethylene group which may be substituted with the alkyl group). The present invention provides a compound having a lactone structure and providing a polymer having excellent characteristics, especially as a resist material and an alcohol substance having a lactone structure useful as the raw material or the like. COPYRIGHT: (C)2005,JPO&NCIPI
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