| 摘要 |
PROBLEM TO BE SOLVED: To provide a membrane forming apparatus constituted so as not only to suppress the waste of a material by employing an ink jet coating method but also to uniformize the thickness of a membrane to be formed as a whole, a method for forming the membrane, an apparatus and a method for manufacturing a liquid crystal device, a liquid crystal device, an apparatus and a method for manufacturing a membrane structure, the membrane structure and an electronic device. SOLUTION: The membrane forming apparatus 1 is constituted so as to coat a substrate SUB with a coating solution prepared by dissolving or dispersing a membrane material in a solvent to form a membrane. This apparatus is equipped with a liquid droplet discharge means having a liquid droplet discharge head 2 for discharging the coating solution to the substrate SUB, a moving means 4 for relatively moving the liquid droplet discharge head 2 and the position of the substrate SUB and a control part C for controlling at least one of the liquid droplet discharge means and the moving means 4, and has an inert gas supply means 5 for supplying an inert gas containing vapor of at least one kind of a solvent to the vicinity of the coating solution applied to the substrate SUB. COPYRIGHT: (C)2005,JPO&NCIPI
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