| 摘要 |
A position detecting method for detecting a position of an object to be detected using a signal from an image of an alignment mark which consists of plural mark elements formed on the object, comprising the steps of acquiring first position information indicating a center position approximated from a form of the all signals, acquiring plural second position information indicating a center position in the alignment mark calculated from whole inflection points of the signal, and selecting the second position information as a center position in the alignment mark which is in a predetermined distance based on the first position from the plural second position information.
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