发明名称 Method and apparatus for detecting a leak of external air into a plasma reactor
摘要 A method (300) and a corresponding apparatus for detecting a leak of external air into a plasma reactor are proposed. The method includes: establishing (340) a plasma inside the reactor, the plasma having a composition suitable to generate at least one predetermined compound when reacting with the air, detecting (345) a light emission of the plasma, and analyzing (350-375) the light emission to identify the presence of the at least one predetermined compound.
申请公布号 US2005037500(A1) 申请公布日期 2005.02.17
申请号 US20030652862 申请日期 2003.08.29
申请人 STMICROELECTRONICS S.R.L. 发明人 CIOVACCO FRANCESCO;SOMBOLI FABIO;FAZIO GIUSEPPE;ALBA SIMONE
分类号 H01J37/32;(IPC1-7):G01N21/00 主分类号 H01J37/32
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