发明名称 |
Method and apparatus for detecting a leak of external air into a plasma reactor |
摘要 |
A method (300) and a corresponding apparatus for detecting a leak of external air into a plasma reactor are proposed. The method includes: establishing (340) a plasma inside the reactor, the plasma having a composition suitable to generate at least one predetermined compound when reacting with the air, detecting (345) a light emission of the plasma, and analyzing (350-375) the light emission to identify the presence of the at least one predetermined compound.
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申请公布号 |
US2005037500(A1) |
申请公布日期 |
2005.02.17 |
申请号 |
US20030652862 |
申请日期 |
2003.08.29 |
申请人 |
STMICROELECTRONICS S.R.L. |
发明人 |
CIOVACCO FRANCESCO;SOMBOLI FABIO;FAZIO GIUSEPPE;ALBA SIMONE |
分类号 |
H01J37/32;(IPC1-7):G01N21/00 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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