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发明名称
图案形成方法及半导体装置之制造方法
摘要
本发明之图案形成方法,系具备以下步骤:形成由具流动性的物质所构成之流动性膜;将推压面具凹部及凸部中至少一方之推压构件的前述推压面推压至前述流动性膜,以将前述凹部及凸部中至少一方转印至前述流动性膜;在将前述推压面推压至前述流动性膜之状态下,藉由将前述流动性膜加热至第一温度,使转印有前述凹部及凸部中至少一方之前述流动性膜固化,以形成固化膜;及藉由将前述固化膜加热至比前述第一温度高的第二温度而焙烧前述固化膜,以形成由已焙烧的前述固化膜所构成之图案。
申请公布号
TW200507175
申请公布日期
2005.02.16
申请号
TW093112950
申请日期
2004.05.07
申请人
松下电器产业股份有限公司
发明人
中川秀夫;世子胜;平井义彦
分类号
H01L21/768;H01L21/304
主分类号
H01L21/768
代理机构
代理人
陈长文
主权项
地址
日本
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