<p>A vacuum evaporation apparatus capable of producing a functional roll film comprising a plastic film (17) which is transparent and having gas barrier properties, and provided at its at least one surface with an inorganic oxide layer, and which is wound like roll; wherein a maximum thickness of said inorganic oxide layer is 1.5 times or less of a minimum thickness, said vacuum evaporation apparatus characterized by having a vacuum chamber (6) in which the long plastic film moves; material holding means (16) having a thin partitioning portion to partition an evaporation material for holding said evaporation material; and heating means which is an electron beam gun (4) for heating and evaporating said evaporation material; wherein said partitioning portion is disposed such as to be inclined through substantially the same angle as an angle of incidence of electron beam irradiated from said electron beam gun. <IMAGE></p>
