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发明名称
REDUCED CROSS-CONTAMINATION BETWEEN CHAMBERS IN A SEMICONDUCTOR PROCESSING TOOL
摘要
申请公布号
EP1506570(A1)
申请公布日期
2005.02.16
申请号
EP20030731261
申请日期
2003.05.20
申请人
ASM AMERICA, INC.
发明人
POMAREDE, CHRISTOPHE;SHERO, ERIC, J.;JYLIHA, OLLI
分类号
B65G49/00;H01L21/00;H01L21/205;H01L21/3065;H01L21/677;(IPC1-7):H01L21/00
主分类号
B65G49/00
代理机构
代理人
主权项
地址
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