,申请号JP19930295281-传众专利搜索

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发明名称
摘要
申请公布号	JP3620052(B2)	申请公布日期	2005.02.16
申请号	JP19930295281	申请日期	1993.11.25
申请人		发明人
分类号	G12B9/08;B23Q1/00;B23Q1/76;C23C16/26;C23C16/27;H01L31/02;(IPC1-7):B23Q1/76	主分类号	G12B9/08
代理机构		代理人
主权项
地址

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