,申请号JP20000101197-传众专利搜索

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发明名称
摘要
申请公布号	JP3619745(B2)	申请公布日期	2005.02.16
申请号	JP20000101197	申请日期	2000.03.31
申请人		发明人
分类号	B08B3/08;C23F1/14;H01L21/304;H01L21/308;(IPC1-7):C23F1/14	主分类号	B08B3/08
代理机构		代理人
主权项
地址

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