发明名称 |
Electrooptical device, method of manufacturing the same, and electronic equipment |
摘要 |
An AMLCD having high fineness and high contrast is realized. First, an interlayer film is provided on an element electrode, and an opening portion is formed in the interlayer film. Next, after a first metal layer is formed, an embedded insulating layer is formed. The embedded insulating layer is retreated by a means, such as an etch back method, to realize a state in which only the opening portion is filled with the embedded insulating layer. By this, electric connection between the element electrode and a second metal layer becomes possible while keeping the flatness.
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申请公布号 |
US6856360(B1) |
申请公布日期 |
2005.02.15 |
申请号 |
US19980198751 |
申请日期 |
1998.11.24 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
HIGUCHI MASAYUKI;MURAKAMI SATOSHI;NAKAZAWA MISAKO |
分类号 |
G02F1/136;G02F1/1333;G02F1/1335;G02F1/1362;G02F1/1368;H01L21/336;H01L29/786;(IPC1-7):G02F1/136;G02F1/133 |
主分类号 |
G02F1/136 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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