发明名称 Contactless optical probe for use in semiconductor processing metrology
摘要 A method and/or device (285) for determining first and second band offsets (100, 110) at a semiconductor/dielectric heterointerface (115), which includes the semiconductor/dielectric heterointerface (115) exposed to incident photons (205) from a light source (200); a detector (275, 280) for generating a signal by detecting emitted photons (260, 265) from the semiconductor/dielectric heterointerface (115); and an element (310) for changing the energy of incident photons (205) to monitor the first and second band offsets (100, 110).
申请公布号 US6856159(B1) 申请公布日期 2005.02.15
申请号 US20030363347 申请日期 2003.09.15
申请人 VANDERBILT UNIVERSITY 发明人 TOLK NORMAN H.;LEUPKE GUNTER;WANG WEI
分类号 G01R31/02;G01R31/311;(IPC1-7):G01R31/02 主分类号 G01R31/02
代理机构 代理人
主权项
地址