发明名称 Method of manufacturing a tunnel magneto-resistance based magnetic memory device
摘要 In a method of manufacturing a magnetic memory device comprising a writing word line (first wiring) and a bit line (second wiring) three-dimensionally orthogonally intersecting therewith, with a TMR device therebetween, a first mask to be a mask shape for the TMR device is formed, the TMR device is formed by use of the first mask as a mask, thereafter a second mask to be used for forming a wiring for connecting the TMR device to a wiring on the lower side thereof is formed while causing at least a part of the second mask to overlap with the first mask so that the first mask becomes a mask at one end side of the wiring, and a connection wiring for connecting the TMR device to the wiring on the lower side thereof is formed by use of the first and second masks.
申请公布号 US6855563(B2) 申请公布日期 2005.02.15
申请号 US20030420440 申请日期 2003.04.22
申请人 SONY CORPORATION 发明人 MOTOYOSHI MAKOTO
分类号 H01L27/105;G11B11/16;H01L21/00;H01L21/8246;H01L29/82;H01L43/00;H01L43/08;H01L43/12;(IPC1-7):H01L21/00 主分类号 H01L27/105
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