VIBRATIONSSTRUKTURKREISEL

摘要

A vibrating structure gyroscope has a vibratory resonator (1) having a substantially ring or hoop-like shape structure, electromagnetic drive means for causing the resonator (1) to vibrate, support means including a plurality of flexible support beams (5) for supporting the resonator whilst allowing it to vibrate and electromagnetic sensing means for sensing movement of the resonator (1). The support beams (5) and resonator (1) are made from silicon and the electromagnetic drive and sensing means are provided by metal tracks (7, 8) which extend externally along each support beam (5) onto and along respective segments of an outer substantially planar surface (1a) the ring-like resonator (1). The resonator (1) is substantially planar and means (13, 14, 14a) are provided to produce a magnetic field substantially perpendicular to the plane of the resonator (1).