| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator having excellent reliability in electrical connection in a condition where materials of a driver and a land are different from each other, to provide its manufacturing method, and to provide a liquid discharge device. <P>SOLUTION: The piezoelectric actuator 11 comprises the driver 15a and the land 15b of different materials with one of these comprising silver and the other comprising a diffusion layer of this silver which is formed at an interface between the two. The ink jet recording head (the liquid discharge device) comprises the piezoelectric actuator 11. The piezoelectric actuator 11 is obtained by printing, on a surface of a stacked sintered body, a driving pattern having Au or Pt as a main component, effecting baking to form the driver 15a, printing a land pattern having silver as a main component so as to be in contact with one end of the driver 15a, and effecting baking at 450-600°C to form the land 15b. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
