发明名称 MAGNETIC FIELD LENS
摘要 PROBLEM TO BE SOLVED: To provide an improved magnetic field lens excellent in temperature stability and having sufficient reactivity over a range of resultant magnetic field strengths. SOLUTION: This lens has asynchronous (different winding number) multi-coil sections, generates magnetic field strength in a desired range, and maintains a sufficiently constant temperature signature when average total electromotive force is maintained constant, thereby eliminating unresonable delays in lens operation when the magnetic field strength is changed. A coil having a smaller winding number among asynchronous lens structures has relatively small inductance, thereby, becomes faster in reactivity, reacts quickly to an AC drive signal, and suitable even to a dynamic focus lens if desired. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005038857(A) 申请公布日期 2005.02.10
申请号 JP20040207895 申请日期 2004.07.14
申请人 FEI CO 发明人 BIERHOFF MART;KOOIJMAN KEES;SANFORD COLIN
分类号 G21K1/093;G21K5/04;H01J37/141;H01J37/21;H01J37/28;(IPC1-7):H01J37/141 主分类号 G21K1/093
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