METHOD FOR PRODUCING STAMPER FOR OPTICAL INFORMATION RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a stamper for an optical information recording medium by which reaction of an inorganic material with a conductive film and a metal layer and electrical decomposition of the inorganic material can be prevented when the metal layer is formed even if the inorganic material is used as a resist. SOLUTION: In the method for producing the stamper for the optical information recording medium, a master 6 with a projecting and recessing pattern is produced by exposing and developing a master substrate 3 for recording in which the resist 2 composed of the inorganic material is formed on a substrate 1. An organic layer 7 is formed by a spin coat method on the projecting and recessing pattern of the master 6. The conductive film 8 is formed on the organic layer 7 and the metal layer 9 is formed on the conductive film 8 by plating. The metal layer 9 alone or together with the conductive film 8 is peeled off from the master 6 and thereby a stamper 10a or 10b having a projecting and recessing pattern complementary to that of the master 6 is obtained. COPYRIGHT: (C)2005,JPO&NCIPI