发明名称 |
Processing of substrates with dense fluids comprising acetylenic diols and/or alcohols |
摘要 |
A dense cleaning fluid for removing contaminants from a substrate and a method comprising same is disclosed herein. In one embodiment of the present invention, the dense cleaning fluid comprises a dense fluid and at least one acetylenic diol or acetylenic alcohol surfactant.
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申请公布号 |
US2005029490(A1) |
申请公布日期 |
2005.02.10 |
申请号 |
US20030737203 |
申请日期 |
2003.12.16 |
申请人 |
SUBAWALLA HOSHANG;PARRIS GENE EVERAD;MAMMARELLA CHRISTOPHER JON;O'BRIEN BRIDGET LYNN;FABREGAS KEITH RANDOLPH;RAO MADHUKAR BHASKARA;KRETZ CHRISTINE PECK |
发明人 |
SUBAWALLA HOSHANG;PARRIS GENE EVERAD;MAMMARELLA CHRISTOPHER JON;O'BRIEN BRIDGET LYNN;FABREGAS KEITH RANDOLPH;RAO MADHUKAR BHASKARA;KRETZ CHRISTINE PECK |
分类号 |
C11D1/72;C11D3/16;C11D3/20;(IPC1-7):C09K5/00 |
主分类号 |
C11D1/72 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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