摘要 |
<p><P>PROBLEM TO BE SOLVED: To make the continuous production of thin films possible by alleviating substrate immersion and lowered substrate transfer efficiency due to burr formation and preventing the operation of the apparatus from being stopped by the cleaning or sweeping of a transfer system. <P>SOLUTION: The thin sheet production method comprises immersing a substrate in a melt to form a thin sheet on the surface of the substrate. The substrate has two members, i.e. a substrate body having a thin sheet growth face and a substrate periphery fitted to the outside of the substrate body and has such a shape that the thickness in the burr formation face of the substrate periphery is thinner than the thickness in the thin sheet growth face of the substrate body. The substrate is immersed in the melt in a state in which the substrate periphery and the substrate body are assembled into one body. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |