| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for blending a deuterium-containing mixtures used for optical fiber manufacturing, and recovering, purifying and recirculating these mixtures. <P>SOLUTION: A deuterium-containing exhaust gas mixture from a process chamber 50, which may contains impurities, is sent through lines 51, 53, recovered by a pump 60, further sent to a purifying unit 70 through a line 60 to be purified. The purified gas is sent to a storage tank 80 through a line 72 and stored. The purified, deuterium-containing gas mixture is blended with a pure deuterium gas from a storage tank 10 in a line 82 and an inert gas from a storage tank 20, and recirculated. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
