发明名称 CRUCIBLE AND METHOD FOR MANUFACTURING FLUORIDE CRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide a crucible and a method for stably manufacturing a fluoride crystal which realize manufacture of a high quality fluoride single crystal having high transmittance in the ultraviolet region or the vacuum ultraviolet region. SOLUTION: The crucible for manufacturing the fluoride crystal is used for manufacturing the crystal by melting a fluoride material and a fluorinating agent. The crucible is composed of a main part for containing the fluoride material and the fluorinating agent and a cap part for covering the main part, and the main part and the cap part can be fixed to each other. A pressure regulating mechanism for regulating the pressure in the crucible is provided in at least either one of the main part and the cap part. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005035825(A) 申请公布日期 2005.02.10
申请号 JP20030198983 申请日期 2003.07.18
申请人 NIKON CORP;OHYO KOKEN KOGYO CO LTD 发明人 KITAMURA IKUO;TAKANO SHUICHI
分类号 C30B11/00;C30B29/12;(IPC1-7):C30B11/00 主分类号 C30B11/00
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