发明名称 Stud electrode and process for making same
摘要 A process of making a stud capacitor structure is disclosed. The process includes embedding the stud in a dielectric stack. In one embodiment, the process includes forming an electrically conductive seed film in a contact corridor of the dielectric stack. A storage cell stud is also disclosed. The storage cell stud can be employed in a dynamic random-access memory device. An electrical system is also disclosed that includes the storage cell stud.
申请公布号 US2005032346(A1) 申请公布日期 2005.02.10
申请号 US20030634163 申请日期 2003.08.05
申请人 发明人 GRAETTINGER THOMAS M.
分类号 H01L21/00;H01L21/02;H01L21/768;H01L21/8242;(IPC1-7):H01L21/00 主分类号 H01L21/00
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