| 摘要 |
The invention features RF plasma generation systems, methods for operating the systems, methods for calibrating the systems, and calibration apparatus. One RF plasma generation system includes an impedance matching network (10) having an input port (11) to receive an RF signal from an RF generator (60), and an output port (12) to deliver the RF signal to an input port of a plasma vessel (50) associated with a load. The system includes an RF signal probe (20) in electromagnetic communication with the input port of the impedance matching network to detect at least one RF signal parameter associated with the RF signal at the input port of the impedance matching network. The system can include a calibration storage unit (40) that stores calibration data. The calibration data includes an association of values of the RF signal parameter with values of at least one characteristic of the load. |
