ACCELERATION SENSOR

摘要

[PROBLEMS] To provide an acceleration sensor reduced in size, capable of eliminating effects thereon by the causes other than acceleration such as temperature variation, and providing high detection sensitivity. [MEANS FOR SOLVING PROBLEMS] This acceleration sensor (1A) comprises a bimorph acceleration detection element (2A) in which first and second resonators (3) and (4) are joined to both faces of a base plate (5) in the acceleration application direction. The longitudinal one end part of the acceleration detection element (2A) is fixedly supported so that the first and second resonators (3) and (4) can be deflected in a same direction according to the application of the acceleration. The frequency variation or impedance variation of the first and second resonators (3) and (4) caused by the deflection of the acceleration detection element (2A) is detected differentially so that the acceleration can be detected. The bending neutral surface of the acceleration detection element (2A) in the action of the acceleration is positioned at the center part of the base plate (5) in the acceleration application direction, and the vibration parts of the first and second resonators (3) and (4) are disposed near the fixedly supported part of the acceleration detection element (2A).