COATING APPARATUS AND METHOD FOR FILLING COATING LIQUID

摘要

PROBLEM TO BE SOLVED: To fill a coating liquid uniformly in a die head.

SOLUTION: The die head 11 is lowered by a controller 33 so that a discharge port 10 is immersed in a liquid pool 21. The coating liquid is filled in the head 11 by alternately performing the work of opening a valve 43 and sucking the coating liquid by a suction pump 35 and the work of opening another valve 41 and supplying the coating liquid by a supply pump 39. A liquid level sensor 25 measures the height h of a liquid level and informs the controller 33 of the measured height h. The controller 33 controls a tank 27 so that the tank 27 is elevated to supply the coating liquid to the pool 21 through a supply pipe 23 when the measured height h is lower than the prescribed height H0and the tank 27 is lowered to lower the liquid level of the pool 21 when the measured height h is higher than the height H0.

COPYRIGHT: (C)2005,JPO&NCIPI