| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck which is manufactured by an aerosol deposition method and in which generation of curvature in an absorption surface can be sharply reduced as compared with the former. SOLUTION: In the electrostatic chuck, aerosol wherein particulates of brittle material are distributed in gas is sprayed from a nozzle toward a conductive substrate and made to collide with the surface of the conductive substrate. The particulates are crushed and transformed by shock of this collision and made to adhere, a dielectrics thin film which consists of composition material of the particulates is formed on the conductive substrate, and the dielectrics thin film surface is made to serve as the absorption surface. Trenches are formed on the surface of the conductive substrate, and the dielectrics thin film is formed in the status of being divided into a plurality of portions along the trenches. COPYRIGHT: (C)2005,JPO&NCIPI |
